Electron Optics
 
   
Electron Gun Tungsten heated cathode
Resolution

High vacuum mode (SE):  

3 nm at 30 Kv

 8 nm at 3 kV
                   
  High vacuum mode

       (BSE, LVSTD):    

        3.5 nm at 30 kV     

Magnification

3x – 1,000,000x
(for 5’’ image width in Continual Wide Field/Resolution)

Maximum field of view 24 mm at WD 30 MM
Accelerating voltage 200 V to 30 kV
Probe Current 1 pA to 2 µA
Electron Optics Working Mode

Resolution: High resolution mode

Depth: Sets the column up in a mode that enhances depth of focus 
Field: Optimizes the column to provide a large non-distorted field of view
Wide Field: Provides an extra-large non-distorted field of view for extra low magnification imaging   
Channeling: Working mode for assessment of crystal orientation data of the specimen, acquiring of electron channeling pattern (ECP). 

 
Note: Technical specification subject to change without notice.
 
 
 
 
Scanning
 
   
Scanning Speed From 20 ns to 10 ms per pixel adjustable in steps or continuously
Scanning Features

Point & Line Scan
Focus Window – shape, size and position continuously adjustable
Dynamic Focus – in plane or folded plane tilted up to ±70 deg 
Image rotation, Image shift, Tilt compensation  
3D Beam –defined tilting scanning axis around XY axis 
Live Stereoscopic Imaging    
Other scanning shapes available through the optional DrawBeam software

 
Note: Technical specification subject to change without notice.
 
 
 
 
Vacuum System
 
   
Chamber Vacuum

High Vacuum Mode: < 9x10-3 Pa*
Medium Vacuum Mode: 3 – 150 Pa
Low Vacuum Mode: 3 – 500 Pa**

Column Vacuum < 9x10-3 Pa*
Pumping Time After Specimen typically < 3 minutes

* pressure < 5x10-4 Pa reachable, optional vacuum gauge needed (on request)

** with low vacuum aperture inserted

Note: Technical specification subject to change without notice.
 
 
 
 
Chamber
 
   
Number of ports 10
 
Note: Technical specification subject to change without notice.
 
 
 
 
Specimen Stage
 
   
Type Eucentric
Movements

Standard: 3-axis motorized
X = 45 mm – motorized*  
Y = 45 mm – motorized*  
Z = 27 mm – manual  
Z'= 6 mm – manual  
Rotation: 360° continuous – motorized*
Tilt: –90° to +90° – manual  
* relative movements only, without position readout

Note: Range of the movements can be dependent on WD and configuration

 
Note: Technical specification subject to change without notice.