| Electron Gun |
Tungsten heated cathode |
| Resolution |
High vacuum mode (SE):
3 nm at 30 Kv
8 nm at 3 kV
High vacuum mode
(BSE, LVSTD):
3.5 nm at 30 kV
|
| Magnification |
3x – 1,000,000x
(for 5’’ image width in Continual Wide Field/Resolution)
|
| Maximum field of view |
24 mm at WD 30 MM |
| Accelerating voltage |
200 V to 30 kV |
| Probe Current |
1 pA to 2 µA |
| Electron Optics Working Mode |
Resolution: High resolution mode
Depth: Sets the column up in a mode that enhances depth of focus
Field: Optimizes the column to provide a large non-distorted field of view
Wide Field: Provides an extra-large non-distorted field of view for extra low magnification imaging
Channeling: Working mode for assessment of crystal orientation data of the specimen, acquiring of electron channeling pattern (ECP).
|
Note: Technical specification subject to change without notice.
| Scanning Speed |
From 20 ns to 10 ms per pixel adjustable in steps or continuously |
| Scanning Features |
Point & Line Scan
Focus Window – shape, size and position continuously adjustable
Dynamic Focus – in plane or folded plane tilted up to ±70 deg
Image rotation, Image shift, Tilt compensation
3D Beam –defined tilting scanning axis around XY axis
Live Stereoscopic Imaging
Other scanning shapes available through the optional DrawBeam software
|
Note: Technical specification subject to change without notice.
| Chamber Vacuum |
High Vacuum Mode: < 9x10-3 Pa*
Medium Vacuum Mode: 3 – 150 Pa
Low Vacuum Mode: 3 – 500 Pa**
|
| Column Vacuum |
< 9x10-3 Pa* |
| Pumping Time After Specimen |
typically < 3 minutes |
* pressure < 5x10-4 Pa reachable, optional vacuum gauge needed (on request)
** with low vacuum aperture inserted
Note: Technical specification subject to change without notice.
Note: Technical specification subject to change without notice.
| Type |
Eucentric |
| Movements |
Standard: 3-axis motorized
X = 45 mm – motorized*
Y = 45 mm – motorized*
Z = 27 mm – manual
Z'= 6 mm – manual
Rotation: 360° continuous – motorized*
Tilt: –90° to +90° – manual
* relative movements only, without position readout
Note: Range of the movements can be dependent on WD and configuration
|
Note: Technical specification subject to change without notice.