| Electron Gun |
Tungsten heated cathode / optionally LaB6 |
| Resolution |
High vacuum mode (SE):
3 nm at 30 kV / 2 nm at 30 kV
8 nm at 3 kV / 5 nm at 3 kV
High vacuum mode
(BSE, LVSTD):
3.5 nm at 30 kV / 2.5 nm at 30 kV
|
| Magnification |
2x – 1,000,000x
(for 5’’ image width in Continual Wide Field/Resolution)
|
| Maximum field of view |
24 mm at WD 30 MM |
| Accelerating voltage |
200 V to 30 kV |
| Probe Current |
1 pA to 2 µA |
| Electron Optics Working Mode |
Resolution: High resolution mode
Depth: Sets the column up in a mode that enhances depth of focus
Field: Optimizes the column to provide a large non-distorted field of view
Wide Field: Provides an extra-large non-distorted field of view for extra low magnification imaging
Channeling: Working mode for assessment of crystal orientation data of the specimen, acquiring of electron channeling pattern (ECP).
|
Note: Technical specification subject to change without notice.
| Scanning Speed |
From 20 ns to 10 ms per pixel adjustable in steps or continuously |
| Scanning Features |
Point & Line Scan
Focus Window – shape, size and position continuously adjustable
Dynamic Focus – in plane or folded plane tilted up to ±70 deg
Image rotation, Image shift, Tilt compensation
3D Beam –defined tilting scanning axis around XY axis
Live Stereoscopic Imaging
Other scanning shapes available through the optional DrawBeam software
|
Note: Technical specification subject to change without notice.
| Chamber Vacuum |
High Vacuum Mode: < 9x10-3 Pa* (with Tungsten heated cathode/LaB6)
Medium Vacuum Mode: 3 – 150 Pa (with Tungsten heated cathode)
Low Vacuum Mode: 3 – 500 Pa** (with Tungsten heated cathode/LaB6)
Optional: 3 – 2000 Pa** (with Tungsten heated cathode/LaB6)
|
| Gun Vacuum |
for LaB6: < 3x10-5 Pa |
| Column Vacuum |
< 9x10-3 Pa* |
| Pumping Time After Specimen Exchange |
High Vaccum Mode:typically < 3,5 minutesMedium Vaccum Mode:typically < 3 minutesLow Vacuum Mode:typically < 3 minutes |
* pressure < 5?10-4 Pa reachable, optional vacuum gauge needed (on request)
** with low vacuum aperture inserted
Note: Technical specification subject to change without notice.
| Number of ports |
11+ (+ configuration and number of ports can be modified to customer’s needs) |
| Chamber Suspension |
Standard: Pneumatic
Optional: Mechanic (rubber elements) – not available with LaB6 option
Active vibration isolation (integrated)
|
Note: Technical specification subject to change without notice.
| Type |
Compucentric, fully motorized |
| Movements |
X = 80 mm (–40 mm to +40 mm)
Y = 60 mm (–30 mm to +30 mm)
Z = 47 mm
Rotation: 360° continuous
Tilt: –80° to +80° (WD and sample size dependent)
|
Note: Technical specification subject to change without notice.