Electron Optics
 
   
Electron Gun Tungsten heated cathode / optionally LaB6
Resolution

High vacuum mode (SE):

3 nm at 30 kV / 2 nm at 30 kV
    8 nm at 3 kV / 5 nm at 3 kV

 

High vacuum mode

(BSE, LVSTD):   

3.5 nm at 30 kV / 2.5 nm at 30 kV

                 

Magnification

2x – 1,000,000x      
(for 5’’ image width in Continual Wide Field/Resolution)

Maximum field of view 24 mm at WD 30 MM
Accelerating voltage 200 V to 30 kV
Probe Current 1 pA to 2 µA
Electron Optics Working Mode

Resolution: High resolution mode        
Depth: Sets the column up in a mode that enhances depth of focus 
Field: Optimizes the column to provide a large non-distorted field of view
Wide Field: Provides an extra-large non-distorted field of view for extra low magnification imaging   
Channeling: Working mode for assessment of crystal orientation data of the specimen, acquiring of electron channeling pattern (ECP). 

 
Note: Technical specification subject to change without notice.
 
 
 
 
Scanning
 
   
Scanning Speed From 20 ns to 10 ms per pixel adjustable in steps or continuously
Scanning Features

Point & Line Scan        
Focus Window – shape, size and position continuously adjustable
Dynamic Focus – in plane or folded plane tilted up to ±70 deg 
Image rotation, Image shift, Tilt compensation  
3D Beam –defined tilting scanning axis around XY axis 
Live Stereoscopic Imaging    
Other scanning shapes available through the optional DrawBeam software

 
Note: Technical specification subject to change without notice.
 
 
 
 
Vacuum System
 
   
Chamber Vacuum

High Vacuum Mode: < 9x10-3 Pa* (with Tungsten heated cathode/LaB6)
Medium Vacuum Mode: 3 – 150 Pa (with Tungsten heated cathode)
Low Vacuum Mode: 3 – 500 Pa** (with Tungsten heated cathode/LaB6)
Optional: 3 – 2000 Pa** (with Tungsten heated cathode/LaB6)

Gun Vacuum for LaB6: < 3x10-5 Pa
Column Vacuum < 9x10-3 Pa*
Pumping Time After Specimen Exchange High Vaccum Mode:typically < 3,5 minutesMedium Vaccum Mode:typically < 3 minutesLow Vacuum Mode:typically < 3 minutes

* pressure < 5?10-4 Pa reachable, optional vacuum gauge needed (on request)

** with low vacuum aperture inserted

Note: Technical specification subject to change without notice.
 
 
 
 
Chamber
 
   
Number of ports 11+ (+ configuration and number of ports can be modified to customer’s needs)
Chamber Suspension

Standard: Pneumatic   
Optional: Mechanic (rubber elements) – not available with LaB6 option
  Active vibration isolation (integrated) 

 
Note: Technical specification subject to change without notice.
 
 
 
 
Specimen Stage
 
   
Type Compucentric, fully motorized
Movements

X = 80 mm (–40 mm to +40 mm) 
Y = 60 mm (–30 mm to +30 mm) 
Z = 47 mm   
Rotation: 360° continuous  
Tilt: –80° to +80° (WD and sample size dependent)

 
Note: Technical specification subject to change without notice.